Miniature High Speed Flow Sensor Module

Model MMCA-0001

Product summary

The flow rate sensor is based on the measurement of the pressure difference across an integrated restriction. The module consists of a MEMS sensor with its dedicated electronic signal processing unit. The Sensor device consists of the fluidic restriction, upstream and downstream independent pressure transducers and a fluid temperature probe. The module provides amplified analog output signals. Inherently, the sensor provides a fast response time of 1 ms. It thus allows to measure accurately pulsed flow, or when integrated over time, the volume of liquid passing through the sensor.

Applications Laboratory instrumentation Flow controller Medical instruments Analytical instruments Liquid handling Features Full Scale Flow range: ± 5 µL/s ± 15 µL/s ± 60 µL/s for water Low pressure drop, typ. 250 mbar at Full Scale flow rate. Response time 1 ms High accuracy, better than 2% FS Temperature compensated Analog 0-5V outputs 8-12 V power supply Small size (53 x 86 x 21 mm3) Standard UNF ¼" - 28 inlet and outlet ports Low dead volume, < 20 µL

MMCA-0001 Datasheet (PDF 870 KB) Customized Calibration and OEM Packaging on request.

Block Diagram

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