Flow Sensor Technology

Seyonic's flow sensor is based on the measurement of the pressure difference across an integrated fluidic restriction. A silicon chip consisting of two piezo-resistive pressure sensors, connected by a micro-channel, forms the actual flow sensor device. The signals available are inlet and outlet pressure and fluid temperature.

In order to address different flow ranges, a family of sensor devices with different restriction geometry has been developed. The tree basic output signals, together with the calibration factor for the restriction and the temperature corrected viscosity of the liquid, are used to calculate the volumetric flow.

The MEMS device is mounted onto a ceramic substrate together with 2 ASICs providing pressure signal amplification and compensation over the temperature range.

After appropriate calibration, the sensor mounted into a plastic manifold.

Fluidic connections to the sensor are made through a custom housing with a 9x9mm footprint for implementation in multi-channel systems that fit the standard micro titer plate format.

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